| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve product yield and quality of a liquid-crystal display panel by, related to a method for manufacturing a liquid-crystal display panel, decreasing the number of processes, especially for exposure process, for improved productivity and lower manufacturing cost while occurrence of transistor defect related to an etching stopper part is suppressed. SOLUTION: After a gate insulating film 6, a channel layer 8, an etching stopper layer are film-formed on a translucent substrate 2 where a gate electrode 4 is formed, the rear surface of the substrate 2 is exposed with the gate electrode 4 as a light-shielding mask by a photolithography technology, a resist is developed as it is, and the etching stopper layer is etched to form an etching stopper 14. Further, after a source/drain layer is film-formed, the remaining parts of the source/drain layer and the etching stopper are etched by a chemical vapor-phase etching.</p> |
