p-TYPE ZnO SINGLE CRYSTAL AND METHOD FOR PRODUCING THE SAME

摘要

A p-type ZnO single crystal having a low resistance; and a method for producing the p-type ZnO single crystal, which comprises providing a substrate (2) in a vacuum chamber (1) and supplying, to the substrate (2), gaseous atoms of Zn, O, N (p-type dopant) and Ga (n-type dopant) in a manner wherein the feeds of N and Ga are controlled so that the ratio of N:Ga in a crystal is 2:1, to thereby grow a p-type ZnO single crystal containing N and Ga.