| 摘要 |
<p>An optical measuring technique suitable for highly reliable multichannel simultaneous measurement. The intensities of the beams of light emitted from a light source (1) are modulated with different frequencies and the modulated beams of light are applied to light irradiation positions of a sample (9). Light emitted from the sample is sensed and transduced by a photodiode (11) to an electric signal. A modulated signal is detected by a lock-in amplifier module (12), and processed as information on the inside of the sample by a processing section (17). Before measurement, beams of light are emitted in order from the light source as a preliminary measurement and the signal levels of sensed light beams are measured for respective light irradiation positions. A control section (19) controls the intensities of the beams and the levels of the sensed signal levels so that the differences between the levels of the beams may be in a predetermined range.</p> |
