SORTING/STORAGE DEVICE FOR WAFERS AND METHOD FOR HANDLING THEREOF
摘要
Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the sorting device. In the immediate vicinity of the sorting device, the cassettes are stored in a magazine which is designed for this purpose and the cassettes are moved using a handling device for cassettes.
申请公布号
WO0022653(A1)
申请公布日期
2000.04.20
申请号
WO1999NL00583
申请日期
1999.09.21
申请人
ASM INTERNATIONAL N.V.;HASPER, ALBERT;NOOTEN, SEBASTIAAN, ELIZA;HENDRIKS, MENSO