Combined preanneal/oxidation step using rapid thermal processing (RTP),申请号EP19990115879-传众专利搜索

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发明名称	Combined preanneal/oxidation step using rapid thermal processing (RTP)
摘要
申请公布号	EP0984486(A3)	申请公布日期	2000.04.19
申请号	EP19990115879	申请日期	1999.08.12
申请人	SIEMENS AKTIENGESELLSCHAFT	发明人	TEWS, HELMUT HORST;SCHREMS, MARTIN;GAERTNER, THOMAS
分类号	H01L21/322;H01L21/26;H01L21/316;H01L21/324;(IPC1-7):H01L21/316	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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