PRODUCTION OF CARBON NANOTUBE MEMBRANE

摘要

PROBLEM TO BE SOLVED: To inexpensively produce a self-sustained carbon nanotube membrane having a large are and a carbon nanotube membrane having various surface shapes. SOLUTION: A thin silicon carbide single crystal film 4 is formed on a silicon wafer 3 by the epitaxial growth of a silicon carbide crystal. The silicon wafer 3 is then etched by immersion in an etching solution to separate the thin silicon carbide single crystal film 4 from the wafer 3 and the thin silicon carbide single crystal film 4 is converted into the objective carbon nanotube membrane 2 by heating to a high temperature in vacuum containing a trace amount of oxygen or in an oxygen-containing inert gas.