METHOD FOR MAKING CHEMICAL COATING FILM THICKNESS UNIFORM, DEVICE FOR ENBODYING THIS METHOD AND CHEMICAL COATING APPLICATOR INCLUDING THIS DEVICE

摘要

PROBLEM TO BE SOLVED: To uniform the nonuniform thickness of a chemical film by the pressure of an air current by spraying this air current to the nonuniform surface of the coating film of the chemical applied on the smooth surface of a substrate. SOLUTION: This device 1 for uniforming the thickness of a chemical coating film has a substrate holder 2 which holds a substrate W previously coated with the chemical at a prescribed film thickness on the smooth surface and an air current generator which uniforms the film thickness of the coating film R of the chemical in an undried state by spraying the air current under prescribed pressure to the surface of the substrate W while the coating film R on the substrate is stilled undried. The device described above comprises a drive assembly 4 which relatively moves the substrate holder 2 and the air current generator in order to uniform spray the air current to the surface of a chemical coating film R in the undried state from its one end toward the other end.