发明名称 Probe scanning device
摘要 A spindle scans a scanner unit comprising a slender tube portion, a thick tube portion and the like in x and y directions by receiving power from a movable member of a voice coil motor. A mechanical zoom switch is provided with a metal having a low melting point at inside thereof and connects a spring for zoom to the spindle when the metal is solidified. Therefore, the spring constant of the spring for zoom is added to the spring constant of the slender tube portion whereby zoom operation is caused. Meanwhile, when heat is applied from a heating coil to the switch, the metal having a low melting point is softened and the spring for zoom is separated from the spindle. Since the metal having a low melting point is used for the switch, the switch can be switched swiftly and the operational performance of the zoom mechanism is improved.
申请公布号 US6051833(A) 申请公布日期 2000.04.18
申请号 US19980016450 申请日期 1998.01.30
申请人 SEIKO INSTRUMENTS INC. 发明人 YASUTAKE, MASATOSHI
分类号 G01N37/00;G01H1/12;G01H17/00;G01Q10/04;G01Q70/04;G01Q70/08;G01Q70/14;G01Q90/00;G12B1/00;(IPC1-7):H01J37/00;G01B5/28 主分类号 G01N37/00
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