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发明名称
摘要
申请公布号
JP3034581(B2)
申请公布日期
2000.04.17
申请号
JP19900273027
申请日期
1990.10.09
申请人
发明人
分类号
F24F7/06;B01D46/00;H01L21/02;H01L21/30;(IPC1-7):H01L21/02
主分类号
F24F7/06
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