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发明名称
APPARATUS FOR WAFER CLEANING
摘要
申请公布号
KR100251874(B1)
申请公布日期
2000.04.15
申请号
KR19930023798
申请日期
1993.11.10
申请人
TOKYO ELECTRON KYUSHU LIMITED;TOKYO ELECTRON LIMITED
发明人
NISI, MITHUO;MIYAJAKI, DAKANORI;MUKAI, EIICHI;GAMIKAWA, YUUJI;DANAKA, YUJI
分类号
B08B11/02;H01L21/00;H01L21/304;H01L21/673;(IPC1-7):H01L21/304
主分类号
B08B11/02
代理机构
代理人
主权项
地址
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