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发明名称
ALIGNER AND EXPOSURE METHOD USING THE SAME
摘要
申请公布号
KR100253054(B1)
申请公布日期
2000.04.15
申请号
KR19967001329
申请日期
1996.12.24
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
HAGASHIKI, TATSUHIKO
分类号
G03F7/207;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/207
代理机构
代理人
主权项
地址
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