| 摘要 |
PURPOSE: A method for forming a super conducting junction by using a cubic YBCO(YBa2Cu3Ox) thin film is provided to solve the problems due to the difference between grid constant and heat expansion factor by using a non-super conducting cubic YBCO layer as a barrier, thereby forming a tunnel type Josephson junction of good quality. CONSTITUTION: A template layer(12), a cubic YBCO film(13A) and an insulating layer(14) ar deposited on an oxide mono-crystalline substrate(11) and then selected areas of the template layer, cubic YBCO film and insulating layer are removed. Then, a structure in which the YBCO film is stacked on a first YBCO super conducting layer(13B) by performing heat treatment for changing a portion of the cubic YBCO film into a first YBCO super conducting layer of orthorhombic structure. Next, a second YBCO super conducting film(16) is deposited on the resultant structure so that two super conductive films are formed on both sides of one non-super conducting film, thereby forming a super conducting junction. Then, a protecting layer(17) is deposited on the second YBCO super conducting film and the insulating layer is exposed by sequentially removing selected areas of the protecting layer and the second YBCO super conducting layer. Finally, a contact is formed in the selected area, and metal electrodes(20B) connected to the first/second YBCO layers.
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