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发明名称
A process for fabricating a device using an ellipsometric technique
摘要
申请公布号
EP0653621(B1)
申请公布日期
2000.04.12
申请号
EP19940308068
申请日期
1994.11.02
申请人
AT&T CORP.
发明人
BLAYO,NADINE;IBBOTSON, DALE EDWARD;LEE, TSENG-CHUNG
分类号
G01J4/00;G01N21/21;H01J37/32;H01L21/302;H01L21/3065;H01L21/66;(IPC1-7):G01N21/21
主分类号
G01J4/00
代理机构
代理人
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