| 摘要 |
The present invention discloses a physical vapor deposition apparatus includes a cable driving and cooling mechanism for driving a cable there-through and for depositing a thin layer of evaporated conductive film on the cable. The thin layer conductive layer can therefore function as a shield to prevent electromagnetic interference (EMI) during high frequency signal transmission. In a preferred embodiment, the apparatus for forming shielding layer for a cable includes two separate chambers. The first chamber is an electric arc chamber for generating metallic vapor by the use of electric arcs. A second chamber is an electron beam chamber. Electron beam generated from an electron gun is irradiated upon an aluminum wire to evaporate the aluminum wire and to deposit the aluminum vapor on the surface of the cable. Both of these chambers are provided with wheels which are employed to direct and pull the cables through the chambers. The wheel is built on a cooling tubes where the cable is cooled through contact with the surface of the wheel with cooling tube formed underneath. Damages from high temperature in these vacuum chambers are prevented with the driving and cooling wheel system.
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