发明名称 TRANSMISSION ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a transmission electron microscope capable of photographing an element distribution image, similarly with a TEM image on a TEM image photographing film. SOLUTION: Electron beam 1, having intensity corresponding to the X-ray intensity data among the X-ray intensity data stored in a memory device once, is emitted from an electron gun 2 synchronously with X, Y scanning signals, and this electron beam is exposed on a film 6 for photographing. With this structure, an element distribution image can be photographed similarly to a normal TEM image.
申请公布号 JP2000106123(A) 申请公布日期 2000.04.11
申请号 JP19980274601 申请日期 1998.09.29
申请人 HITACHI LTD 发明人 OBUKI TOMOHARU
分类号 H01J37/252;H01J37/26;(IPC1-7):H01J37/252 主分类号 H01J37/252
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