AIRKNIFE AND DRYING TREATMENT APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an airknife capable of efficiently and accurately removing and drying a treating liquid adhering onto a substrate. SOLUTION: In an airknife 16 for removing a treating liquid adhering onto a substrate by a pressure, there is arranged the body 17 of the knife which has a space part 18 formed to let compressed air be introduced thereinto. A pair of slits one end of which communicates with the space part while the other end is opened to the side of the lower end of the knife body to jet out compressed air is formed on the knife body being separated across the thickness of the knife body 17 and along the length thereof.