SEMICONDUCTOR ACCELERATION SENSOR AND SELF-DIAGNOSIS

摘要

PROBLEM TO BE SOLVED: To accurately and inexpensively accomplish a self-diagnosis for diagnosing whether or not the semiconductor sensor portion is normally operated. SOLUTION: The acceleration sensor is provided with a weight portion; a semiconductor sensor portion 1 in which a flexure portion of which one end is connected to the weight portion such that it is deflected by applying an acceleration to the weight portion and a sensor portion formed on the flexure portion so as to convert the acceleration to an electrical signal based on the flexure of the flexure portion are formed on a semiconductor substrate, a sensor portion cover 1a for covering the semiconductor sensor portion 1, and a weight portion driving means 3 for driving the weight portion and self-diagnoses a normal operation of the semiconductor sensor portion 1. In this case, the weight portion driving means 3 is constituted by an electromagnetic relay 31 being adjacent to the sensor portion cover 1a and having a contact point generating a vibration opening/closing driven by a coil, and a continuous driving circuit for continuously opening/closing driving the electromagnetic relay 31.