THREE-DIMENSIONAL SHAPE MEASURING INSTRUMENT, ITS METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To make it possible to quickly measure the shape of an object to be measured. SOLUTION: An object light reflected by an object 4A to be measured is converged by a lens 111 through a half mirror 109 and its image is formed on an image pickup element 11A through a stop 110. A reference light is radiated from an objective lens 106 through a wedge glass 105 and converged by a lens 108A through a spatial filter 107 and its optical path is changed to the right direction and follows the same optical path as the object light. At the time, a speckle image is recorded on the image pickup surface of the element 11A. The wedge glass 105 is moved in the left direction in the figur at a prescribed speed so as to change the phase of the reference light.