发明名称 PRODUCTION OF MULTIPLE LIGHT SOURCE FORMING REFLECTION MIRROR AND OPTICAL DEVICE USING THIS REFLECTION MIRROR
摘要 PROBLEM TO BE SOLVED: To easily form a basic reflection surface having a surface shape of high accuracy by pressing a surface to be worked of a workpiece by a pressing means having the compressive strength higher than the compressive strength of the surface to be worked and having a prescribed shape at its front end to plastically deform this surface in such a manner that the basic reflection surface has a prescribed curvilinear surface shape. SOLUTION: The workpiece 310 is installed on a work table 325 and the pressing means 326 is arranged in the upper part of the workpiece 310. Brass is used for the workpiece 310. The pressing means 326 is connected to a drive assembly 327. The pressing means 326 worked at its front end to the prescribed reversal shape is controlled in its position with respect to the workpiece 310 on the work table 325 by a control means 328. After the pressing means 326 is positioned to the prescribed position, the pressing means presses the workpiece while a descending quantity is controlled, by which the prescribed surface shape is formed on the surface. Namely, the prescribed optical surface shape is formed in the arbitrary position on the workpiece 310 by the control of the position of the pressing means 326 and the control of the pressing quantity of the pressing means 326.
申请公布号 JP2000098112(A) 申请公布日期 2000.04.07
申请号 JP19980268583 申请日期 1998.09.22
申请人 NIKON CORP 发明人 KONDO HIROYUKI;TAKINO HIDEO
分类号 H01L21/027;G02B5/08;G02B5/10;G03F7/20;(IPC1-7):G02B5/10 主分类号 H01L21/027
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