SOLID-STATE IMAGE SENSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a solid-state image sensing device with a full frame transfer(FFT) or frame transfer(FT) type CCD capable of a high speed charge transfer as a surface incidence type. SOLUTION: Light receiving parts 1 of an FFT type CCD or FT type CCD have polycrystalline Si transfer electrodes having a high wiring resistance, compared with a metal one and metal-made or metal silicide-made sub-electrodes 11-19 separate from them which are disposed obliquely to the transfer electrodes or otherwise in a different constitution or shape from the transfer electrodes, so as to essentially minimize the area covered with the transfer electrodes impermeable to lights. This makes an effective light reception/image sensing compatible with a high speed charge transfer with voltages fed to the transfer electrodes.