| 摘要 |
PROBLEM TO BE SOLVED: To manufacture accurately a diffraction grating on a side surface of a rotary shaft of a motor, a side surface of a rotary shaft of a finger joint of a robot, and the like, directly. SOLUTION: A pattern on a mask 1 being an original plate is transcribed to a non-flat plane work 10. The mask 1 is moved in the prescribed direction in a state in which the mask 1 is irradiated with a luminous flux L from an exposure light source. And the pattern on the mask 1 is transcribed on the non-flat plane work 10 by rotating the non-flat plane work 10 by rotation quantity corresponding to movement of this mask 1. Thereby, exposure for performing accurate transcription on a non-flat plane work can be realized. Also, it is preferable that a mask is contacted with a non-flat work and the non-flat work is rotated in accordance with movement of a mask.
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