| 摘要 |
PROBLEM TO BE SOLVED: To enhance productivity of epitaxial process by measuring the height even at a plurality of measuring object parts collectively thereby shortening the time required for measuring height. SOLUTION: The equipment for measuring the height of respective measuring object parts 4a-4d set on a spiral work coil 4 comprises a plurality of ultrasonic sensors 16a-16d for measuring the distance between the measuring object parts 4a-4d and sensor reference faces f arranged in an imaginary plane extending in parallel with the reference plane 5a on the upper surface of a base plate 5 directly above respective measuring object parts 4a-4d, a vertical gauge 15 for measuring the distance between the reference plane 5a and the sensor reference face f, and a control terminal 17 having an operating function for calculating the height from the reference plane 5a to respective measuring object parts 4a-4d based on measured distance information obtained from ultrasonic sensors 16a-16d and the vertical gauge 1.
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