| 摘要 |
PURPOSE: A device for providing a laser beam of a semiconductor manufacturing device simultaneously provides a laser beam to many devices, reduces an installation cost and a maintenance cost of the device, enhances a volume ratio of the device, and reduces the number of spare components. CONSTITUTION: A device for providing a laser beam has a reflective body. The reflective body (31,32,341,42) is mounted on an optical line generated from a light source(110), simultaneously provides a laser beam to many devices(30,40), reflects the laser beam generated from the light source in many directions. Thereby, the device reduces an installation cost and a maintenance cost of the device, enhances a volume ratio of the device, and reduces the number of spare components.
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