ACTUATOR DEVICE OF STACK TYPE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An actuator device of stack type and manufacturing method thereof is provided to reduce the size and to lower a drive voltage and to relieve a stress. CONSTITUTION: An actuator device of stack type includes an actuator material, a plurality of internal electrodes(41), a plurality of through holes(33) and an external hole(12). The actuator material is formed by stacking piezo-electric sheets(44,47) at least two layers having a piezo-electric characteristic. The plurality of internal electrodes are formed between the stacked piezo-electric layers. The plurality of through holes are formed on the piezo-electric sheets. The external electrode is formed on an end of the actuator material on which the piezo-electric sheet and the internal electrode are stacked, and connected to the internal electrodes. The internal electrodes are alternately connected through the through holes. The internal electrodes and an electrode for connection(42) within the through holes are simultaneously formed.