摘要 |
The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.
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申请人 |
APPLIED MATERIALS, INC. |
发明人 |
FISHKIN, BORIS;GARRETSON, CHARLES, C.;MCKEEVER, PETER;OSTERHELD, THOMAS, H.;PRABHU, GOPALAKRISHNA, B.;BENNETT, DOYLE, E.;BONNER, BENJAMIN, A.;HUEY, SIDNEY |