LOW METAL ION CONTAINING 4,4'-(1-(4-(1-(4-HYDROXYPHENYL)-1-METHYLETHYL)PHENYL)ETHYLIDENE)BISPHENOL AND PHOTORESIST COMPOSITIONS THEREFROM

摘要

The present invention provides methods for producing TPPA having low level of metal ions, utilizing treated ion exchange resins. A method is also provided for producing photoresist composition having a very low level of metal ions from such TPPA for producing semiconductor devices using such photoresist compositions.