发明名称 |
Thermal mass flow controller having orthogonal thermal mass flow sensor |
摘要 |
A thermal mass flow controller having a thermal mass flow meter with an orthogonal thermal mass flow sensor includes a base defining a primary fluid flow path therein for carrying a flow of fluid to be metered. A pressure dropping bypass is positioned in the primary fluid flow path. A flow measuring portion of a thermal mass flow sensor is oriented substantially transversely or orthogonally with respect to and is in communication with the primary fluid flow path. The flow measuring portion includes a portion of an electrical bridge for determining a temperature of the sensor and produces a mass flow rate signal in response thereto. A valve is connected to an outlet of the primary flow path to control the flow of fluid in response to the mass flow rate signal.
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申请公布号 |
US6044701(A) |
申请公布日期 |
2000.04.04 |
申请号 |
US19970815323 |
申请日期 |
1997.03.10 |
申请人 |
UNIT INSTRUMENTS, INC. |
发明人 |
DOYLE, MICHAEL J.;LEMAY, DAN B.;VU, KIM N. |
分类号 |
G01F1/684;G05D7/06;(IPC1-7):G01F1/68 |
主分类号 |
G01F1/684 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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