发明名称 Charge for vertical boat growth process and use thereof
摘要 In vertical boat growth of GaAs single crystal ingots, graphite powder, in selected amounts, is included in the charge to establish directly related planned target electrical characteristics in the as grown ingots. The electrical characteristics correspond to concentrations of carbon in the as grown ingots.
申请公布号 US6045767(A) 申请公布日期 2000.04.04
申请号 US19970975746 申请日期 1997.11.21
申请人 AMERICAN XTAL TECHNOLOGY 发明人 LIU, XAIO;ZHU, MENG
分类号 C30B29/42;C30B11/00;C30B11/08;H01L21/208;H01L21/22;(IPC1-7):C01B33/26 主分类号 C30B29/42
代理机构 代理人
主权项
地址