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发明名称
摘要
申请公布号
JP3028082(B2)
申请公布日期
2000.04.04
申请号
JP19970166256
申请日期
1997.06.23
申请人
发明人
分类号
H01L21/322;H01L21/02;(IPC1-7):H01L21/322
主分类号
H01L21/322
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