发明名称 |
CLEAN ROOM |
摘要 |
Apparatus comprising an outside-air conditioner 2, an operation zone 4, a ceiling filter 8 such as an HEPA or ULPA filter, a fan filter unit 9 comprising a chemical filter and a draft fan arranged only on an overhead carrying apparatus 5 and storing apparatus 6 arranged in the operation zone 4 in a clean room 1 chemical mist causing chemical contamination is removed to the carrying apparatus 5 and storing apparatus 6./! |
申请公布号 |
KR100250354(B1) |
申请公布日期 |
2000.04.01 |
申请号 |
KR19970019113 |
申请日期 |
1997.05.17 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
NAGAFUNE, HITOSHI;FUKUMOTO, TAKAAKI;SHIBUYA, HAKUSHI;EZAKI, KOJI |
分类号 |
E04H5/02;F24F3/16;F24F7/06;H01L21/02;(IPC1-7):H01L21/00 |
主分类号 |
E04H5/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|