| 摘要 |
PROBLEM TO BE SOLVED: To develop a large force with higher resonance frequency even when design is made to obtain displacement similar to that of a metal shim and to attain higher reliability even after the long-term drive, by utilizing a fiber- reinforced resin forming non-electrolytic plating as the shim. SOLUTION: This piezoelectric actuator is composed of a shim 2, a piezoelectric plate 1 and a bonding layer 3 forming bonding these elements. As the shim 2, a fiber-reinforced resin forming the non-electrolytic plating is used. As the piezoelectric plate 1, a lead titanate zirconate based ceramics plate having a comparatively large piezoelectric constant is used as a material. The surfaces opposing with each other are respectively provided with electrodes of silver or nickel with the burning method or plating method and thereafter, the surfaces are polarized. Moreover, the fiber-reinforced resin is a composite material which is reinforced through dispersion of fiber in the resin. As the reinforced fiber material, carbon fiber is used while, as the resin material, epoxy is used. In addition, nickel plating is applied as the non-electrolytic plating. |
