发明名称 Improvements in or relating to the manufacture of semiconductor bodies
摘要 1,107,008. Semi-conductor devices. SIEMENS A.G. 11 Nov., 1966 [11 Nov., 1965]. No. 50796/66. Heading H1K. Manganese is introduced into a semi-conductor body such as silicon, to provide recombination centres by exposing the body while heated to vapours of a manganese-oxygen compound. The compound may be one or more of MnO, MnO 2 , Mn 2 O 3 , or Mn 3 O 4 . The Figure shows silicon discs 6 in a quartz compoule containing a boat 5 filled with a manganese oxide; the compoule is heated to 960‹ C. for one hour. The process is particularly applicable to thyristors to reduce the recovery period after quenching.
申请公布号 GB1107008(A) 申请公布日期 1968.03.20
申请号 GB19660050796 申请日期 1966.11.11
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人
分类号 C23C16/06;C30B31/06;H01L21/00;H01L21/22;H01L29/74 主分类号 C23C16/06
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