| 摘要 |
<p>PROBLEM TO BE SOLVED: To miniaturize a device and to reduce costs by first accelerating a stage to a scanning speed with a second drive mechanism. SOLUTION: First, a scanning stage 23 is accelerated to a required speed by sub linear motors B1 and B2. While the scanning stage 23 has reached the required speed, it touches a coil spring 24 of a thrust generation device C1. The spring 24 is compressed, and the scanning stage 23 is decelerated and then stops. Then, the compressed spring 24 repels to return to dimensions before compression, and the scanning stage 23 changes a traveling direction, and begins to accelerate with accumulated elastic energy. Then, the dimensions of the spring 24 are returned and the speed of the scanning stage 23 is set to a specific speed. At this time, the sub linear motors B1 and B2 control the scanning speed of the scanning stage 23. Then, the scanning stage 23 touches a coil spring 25 at a thrust generation device C2 at an opposite side, repeats a similar operation, and reciprocates between the coil springs 24 and 25.</p> |
