| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate fixing device, with which the fixing work of a small diameter on a ceramic substrate can be carried out easily and from which vacuum hardly leaks out. SOLUTION: A standard-diameter substrate 30 of a substrate fixing device, having the substrate 30 for holding a small-diameter substrate 20, has a plurality of linear grooves 32 formed on the surface of the substrate 30 which faces the substrate 20, a plurality of cross linear grooves 34 which are formed to intersect the grooves 32, and through-holes 36 formed at the intersections between the grooves 32 and 34. The small diameter substrate 20 is sucked to the standard diameter substrate 30 by evacuating via the through-holes 36.</p> |
