| 摘要 |
PROBLEM TO BE SOLVED: To perform the aging in a short time by switching a short circuit switch provided between a positive and a negative electrodes of each power supply from outside of a container, and opening the only one switch of the short circuit switches so as to individually perform the aging between the electrodes in the condition that the insulating gas is filled in the container, and thereafter, opening the all switches for blanket aging. SOLUTION: Switches SW1-SW5 for making a short-circuit between terminals of a first - a fifth power supplies 21-25 through a current limiting resistor are provided, and the first switch SW1 is connected between a positive and a negative electrodes of the first power supply 21, and the second switch SW2 is connected between a positive and a negative electrodes of the second power supply 22, and the third switch SW3 is connected between a positive and a negative electrodes of the third power supply 23. The fourth and the fifth switches SW4, SW5 are similarly connected in the fourth power source 24 and the fifth power supply 25. In aging the ion source, firstly, aging between each electrode is separately performed, and thereafter, blanket aging is performed. The SF6 gas 5 is filled in a container at the all aging, and a control board 6 for controlling a short circuit switch driving circuit 7 is provided outside of the container 2.
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