| 摘要 |
PROBLEM TO BE SOLVED: To realize a stable displacement, velocity sensor having a wide measuring range which uses interference wherein influence due to instability of alignment of optical components is little, size is reduced at the same time, assembling in an actuator or a precise apparatus is enabled, inertia is small, high speed operation is possible, and coupling loss is small, by unifying optical components in a body, and simplifying the constitution of mechanical movement mechanism for adjusting optical path difference. SOLUTION: By using a thin film optical sensor FS capable of transmitting a laser light, a standing wave is generated on an optical axis. The standing wave optical signal is made possible to be measured by the thin film optical sensor FS. By using a parallel light having a large beam diameter, a measuring range is enlarged, and use is facilitated. An optical system is made suitable for a structure which is simplified and miniaturized. Therefore a displacement, velocity sensor using laser interference can be realized which has simple constitution without needing to arrange a signal line on a moving object whose displacement, velocity is to be measured.
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