发明名称 FERROELECTRIC THIN FILMS OF REDUCED TETRAGONALITY
摘要 A ferroelectric material, especially as incorporated into a crystallographically oriented epitaxial ferroelectric cell, of Pb1-xLaxZryTi1-yO3 or Pb1-xNbxZryTi1-yO3 having a moderately high La or Nb content such that the unit cell is less tetragonal, that is, more nearly cubic, so as to reduce stress effects. A most preferred value of the c/a constant is about 1.01. Exemplary compositional ranges for x are 6 to 20 % for La and 3 to 15 % for Nb, when y is 20 %. The reduced polarizabilities voltages are consistent with integrated ferrroelectric memories operating at 3.0V and lower.
申请公布号 WO0017936(A1) 申请公布日期 2000.03.30
申请号 WO1999US22178 申请日期 1999.09.24
申请人 TELCORDIA TECHNOLOGIES, INC.;UNIVERSITY OF MARYLAND 发明人 RAMESH, RAMAMOORTHY
分类号 G11C11/22;H01L21/02;H01L21/316;H01L21/8246;H01L27/105;H01L27/115;H01L29/51;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 G11C11/22
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