发明名称 Photosensitive compositions and pattern formation method
摘要 Photosensitive compositions prepared without use of a chromium compound. The compositions exhibit high resolution and satisfactory sensitivity, and do not cause environmental pollution. The photosensitive compositions contain a water-soluble azide compound which serves as a photocrosslinking agent and poly(N-vinylacetamide) that is photocrosslinkable in the presence of the water-soluble azide compound.
申请公布号 EP0989461(A1) 申请公布日期 2000.03.29
申请号 EP19980118140 申请日期 1998.09.24
申请人 SHOWA DENKO KABUSHIKI KAISHA;TOYO GOSEI KOGYO CO., LTD. 发明人 WATANABE, MASAHARU;TOCHIZAWA, NORIAKI;TAGOSHI, HIROTAKA;YAMAGUCHI, TETSUHIKO
分类号 G03F7/012 主分类号 G03F7/012
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