Semiconductor inspection device with guide member for probe needle for probe card and method of controlling the same

摘要

A semiconductor inspection device and a method of controlling the same are obtained which are capable of preventing any positional displacement of a probe needle of the semiconductor inspection device relative to an electrode of a semiconductor device to be inspected and thus ensuring that the semiconductor device is inspected. The semiconductor inspection device provided with a probe needle for a probe card and a guide plate for positioning the probe needle employs a temperature sensor provided on the probe needle positioning guide plate, a heater for heating the positioning guide plate and a cooling fan for cooling the positioning guide plate and refers to the temperature of the positioning guide plate measured by the temperature sensor to provide ON/OFF control of the heater and the cooling fan by means of a control device.