发明名称 GRINDING METHOD USING INTEGRATED GRINDING WHEEL
摘要 PROBLEM TO BE SOLVED: To machine a workpiece with high accuracy without generating a streak (flaw) to a specific part of the workpiece surface while using a formed grinding wheel by polishing abrasive grains of a grinding wheel layer on the surface of the formed grinding wheel before grinding the workpiece so as to make the protruding height of the abrasive grains constant. SOLUTION: The position of a flaw generated when a workpiece is ground is the case of a protruding abrasive grain 13 existing in a grinding wheel layer 12 electrodeposited to a formed grinding wheel 101 is measured, and the existing position of the protruding abrasive grain 13 corresponding to the flaw is specified in the radial direction of a grinding wheel rotation axis 14 from the position relation between the grinding wheel rotation axis 14 and a workpiece rotation axis. A probe of a surface shape measuring device is disposed in a radial position where the protruding abrasive grain 13 exists, to circumferentially specify the position of the protruding abrasive grain 13, where the surface height of the grinding wheel layer is protruded. A polishing tool 35 is positioned to polish only the tip of the protruding abrasive grain 13 so as to be the same height as its periphery. The protruding abrasive grain 13 is therefore eliminated, and the protruding height of abrasive grains on the surface of the grinding wheel layer 12 can be made constant.
申请公布号 JP2000084819(A) 申请公布日期 2000.03.28
申请号 JP19980256584 申请日期 1998.09.10
申请人 NIKON CORP 发明人 HAMADA TAKAHARU
分类号 B24B53/06;B24B13/00;B24B13/01;(IPC1-7):B24B13/01 主分类号 B24B53/06
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