| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of deformation caused by the self-weight of optical parts or the stress in assembling when in use, by executing measurement by retaining a work face of the optical parts in roughly the same state as the used state, and by deciding a machining quantity relative to an in-plane coordinate by comparing the measured face shape with the designed face shape, and by correctively machining the work face. SOLUTION: In case that machining of optical parts, namely, a work piece, is executed, the optical parts 1 are retained in roughly the same state as the used state prior to the machining, and a face shape of the optical parts 1 in the used state is measured in this state by a face shape measuring device 5. In this case, at the time of retention of the optical parts 1, the optical parts 1 are supported by a support member 3 by using an actual lens-barrel 2, and at the time of measurement, an interference measurement method by a Fizeau interferometer is used. And, in a computer used as an operation device, the measured data are compared with designed data, and a correction machining quantity is calculated, and the calculated correction machining quantity is outputted to a coordinate machining machine 6 as shape error information. Hereby, machining of the high-precision optical parts can be executed with an excellent yield.
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