| 摘要 |
PROBLEM TO BE SOLVED: To prevent the sticking of organic materials on the surface of a work and to surely remove not only relatively large dust but ultrafine dust from the surface of the work in a dust collector. SOLUTION: This dust collector is provided with a dust collecting head 1 for removing dust by blowing ultrasonic air on the surface of a work W and a dust collecting circuit 2 having an air supply passage 7 for supplying air to the dust collecting head 1 and an air suction passage 8 for sucking air from the dust collecting head 1. A chemical filter 4 for removing the organic materials is interposed in the air supply passage 7 side of the dust collecting circuit 2.
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