摘要 |
An optical member for transmitting light of a wavelength less than about 200 nm including crystalline calcium fluoride with a potassium content less than about 0.5 ppm, wherein a degradation in a transmissivity of the optical member after an irradiation for a fixed period of time with the light of the wavelength of less than about 200 nm is less than about 5% of a transmissivity of the optical member before the irradiation. <IMAGE> |