| 摘要 |
PROBLEM TO BE SOLVED: To reduce oxygen degrading electron emission characteristics of an electron source to stabilize the electron emission characteristics for a long time by forming the topmost layer with a metal back of aluminum nitride. SOLUTION: After a metal back formed of aluminum on a phosphor layer, an aluminum nitride layer is formed on the surface by an ion plating method in a nitrogen atmosphere or a sputtering method in a nitrogen atmosphere, or a mixing layer of nitrogen and aluminum having the surface of the aluminum metal back irradiated with nitrogen atoms. Because the surface layer is not oxidized even during the sealing process of the phosphor screen or in a storage condition after the sealing by virtue of the formation of the chemically stable nitrified layer, the quantity of a released oxygen gas can be reduced, even if electrons are irradiated on the phosphor. Electron emission characteristics are made to operate for a long time by applying the phosphor screen, having the nitrified metal back layer to an image display device which has multiple surface conduction type electron emission elements arranged.
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