DEVICE INSPECTION METHOD AND MANUFACTURE OF DEVICE BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To reduce the number of substrates used for inspection monitoring and to reduce the costs per unit device when a device is manufactured through various processes from a plurality of substrates while the substrates are used in one lot. SOLUTION: While a plurality of substrates are used in one lot, a device is manufactured by various processes from the substrates. At this time, at least one substrate is selected as a substrate 1 for inspection monitoring from the lot. A unit device is taken out from the substrate 1 for inspection monitoring in every inspection of a desired process. The inspection monitoring is performed by using the unit device so as to be achieved.