摘要 |
PROBLEM TO BE SOLVED: To provide a variable tuning YIG(yttrium iron garnet) oscillator and its production which never substantially cause mechanical variance of a resonance circuit. SOLUTION: An amplifier element 2, an electrode, circuit patterns 6, 6' and 6", etc., of the oscillation circuit part of a YIG oscillator are monolithically integrated on the surface of a semiconductor substrate 40 by a monolithic integrated circuit manufacturing technique. A coupling loop 3 is formed on the said substrate 40 as a thick film conductor having a shape surrounding at least a part of the outer circumference of a YIG crystal ball 1. Then a hole 47 is formed at an inside prescribed position of the loop 3 to decide the position of the ball 1 from the surface of the substrate 40, and the ball 1 is fit and fixed into the hole 47. |