POLLUTION LEVEL MEASURING METHOD OF PUMP OIL FOR MANUFACTURING SEMICONDUCTOR ELEMENT AND METHOD THEREOF

摘要

PURPOSE: A pollution level measuring method of pump oil for manufacturing semiconductor element and the method thereof are provided to minimize the failure rate in the pump operation and therefore enhance the life of the pump. CONSTITUTION: The pollution level measuring method of pump oil for manufacturing semiconductor element comprises: a step inserting a sensor consisted of a insulator and two cores and applying voltage to a voltage-current convertor in a controller to apply current to one of said cores; a step detecting current in the other core of said sensor; a step converting said detected current into voltage by the current-voltage convertor; a step transmitting said applied voltage and said converted voltage to a monitor via the controller; and a step comparing said applied voltage and said converted voltage on the monitor.