CHARGED-PARTICLE-BEAM EXPOSURE DEVICE,申请号KR19990018187-传众专利搜索

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发明名称	CHARGED-PARTICLE-BEAM EXPOSURE DEVICE
摘要
申请公布号	KR100242926(B1)	申请公布日期	2000.03.15
申请号	KR19990018187	申请日期	1999.05.20
申请人	FUJITSU LIMITED	发明人	OOAEH, YOSHIHISA;ABE, TOMOHIKO;YAMADA, AKIO;YASUDA, HIROSHI;KUDOH, KENJ;TAKAHATA, KOUZI
分类号	H01J37/07;H01J37/065;H01J37/24;H01J37/30;(IPC1-7):H01J37/07	主分类号	H01J37/07
代理机构		代理人
主权项
地址

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