UNITY REPAIRING SYSTEM AND CONTROL METHOD THEREOF

摘要

PURPOSE: A unity repairing system and control method is provided to repair at a final stage of a fabrication processing at one time referring to a unified file which includes a failure content generated at each inspector. CONSTITUTION: The control method of a unity repairing system comprises the steps of: forming a predetermined pattern on a substrate at each process; performing an optical or electrical inspection with regard to the predetermined pattern formed on the substrate after each process and storing the inspection result to a plurality of files when an error is generated to the substrate; and unifying the inspection result stored in the files of the plurality to delete an overlapped part and repairing errors generated at the substrate in a lump.