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发明名称
EXPOSING APPARATUS
摘要
申请公布号
KR100250155(B1)
申请公布日期
2000.03.15
申请号
KR19970063441
申请日期
1997.11.27
申请人
SAMSUNG TECHWIN CO.,LTD.
发明人
LEE SANG GWUN;KIM GI SOO
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
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